SC20FAST Magnetic Field Cancelling System The SC20FAST is a version of our original SC20 field cancelling system that has been optimised to cancel the high frequency fields, typically at 9kHz,  from robotic wafer transports in 300mm wafer fabs. These fields limit the performance of electron beam tools in the fab and are a barrier to achieving the next semiconductor device CD node.The field cancelling cables are installed in the EBeam Tool enclosure or on a frame around un-enclosed tools.   The SC20FAST uses a special 25Hz - 200kHz bandwidth AC field sensor. The control unit has faster output amplifiers and retuned filters in the feedback loop. An SC24/DC+AC sensor  can be added if DC field cancelling is also required. Watch this space for the SC26 - a fast version of the new SC24 cancelling system.     SC20FAST Features ▶ Cancels the high frequency (9kHz typ.) magnetic field from robotic wafer transports in 300mm wafer fabs ▶ Enables electron beam tools to meet full specification in the vicinity of overhead wafer transport robots ▶ 12 x field reduction at 9kHz ▶ >20 x field reduction from 25 Hz- 6 kHz with AC sensor ▶ >50 x field reduction from DC - 1 kHz with added DC sensor ▶ Adapts to field changes within 10 ?s ▶ Full 3 axis (X, Y, Z) system ▶ >26 mG (2.6 ?T) pk-pk cancelling range ▶ Simple “set and forget” operation ▶ Cancels and monitors the field ▶ Network monitoring option available